Modelling of Magnetron TiN Deposition Using the Design of Experiment
Crossref DOI link: https://doi.org/10.1007/978-3-030-61659-5_6
Published Online: 2021-02-06
Published Print: 2021
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zahradníček, Radim
Mouralová, Kateřina
Prokeš, Tomáš
Hrabec, Pavel
Bednář, Josef
Text and Data Mining valid from 2021-01-01
Version of Record valid from 2021-01-01
Chapter History
First Online: 6 February 2021