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A Digital Twin for MEMS and NEMS

Crossref DOI link: https://doi.org/10.1007/978-3-030-79827-7_36

Published Online: 2022-11-11

Published Print: 2023

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Korvink, Jan G.

Poletkin, Kirill V.

Deng, Yongbo

Feng, Lihong
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Text and Data Mining valid from 2022-11-11

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First Online: 11 November 2022