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Topological Optimization of Multilayer Structural Elements of MEMS/NEMS Resonators with an Adhesive Layer Subjected to Mechanical Loads

Crossref DOI link: https://doi.org/10.1007/978-3-030-87185-7_13

Published Online: 2021-12-30

Published Print: 2022

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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