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Quantum Dynamics Effects on Amplitude-Frequency Response of Superharmonic Resonance of Second-Order of Electrostatically Actuated NEMS Circular Plates

Crossref DOI link: https://doi.org/10.1007/978-3-031-04548-6_4

Published Online: 2022-05-04

Published Print: 2022

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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