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Investigation of Structural and Electrical Properties of Ta2O5 Thin Films with Sputtering Parameters for Microelectronic Applications

Crossref DOI link: https://doi.org/10.1007/978-3-031-20353-4_30

Published Online: 2022-11-21

Published Print: 2023

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Sahoo, Kiran K.

Pradhan, D.

Ghosh, S. P.

Gartia, A.

Kar, J. P.
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Text and Data Mining valid from 2022-11-21

Version of Record valid from 2022-11-21

Text and Data Mining valid from 2022-11-21

Version of Record valid from 2022-11-21
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Chapter History

First Online: 21 November 2022

Conference Information

Conference Acronym: MAMM

Conference Name: Conference on Microactuators and Micromechanisms

Conference City: Hyderabad

Conference Country: India

Conference Year: 2022

Conference Start Date: 2 December 2022

Conference End Date: 4 December 2022

Conference Number: 6

Conference ID: mamm2022