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Deposition and Characterization of Magnetron Sputtered AlN Coatings with Variable Stoichiometry

Crossref DOI link: https://doi.org/10.1007/978-3-031-43210-1_20

Published Online: 2023-12-04

Published Print: 2023

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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