Silicon Micro/Nanomachining and Applications
Crossref DOI link: https://doi.org/10.1007/978-3-031-70499-4_8
Published Online: 2024-12-29
Published Print: 2025
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Phan, Hoang-Phuong
Dao, Dzung Viet
Nguyen, Nam-Trung
Text and Data Mining valid from 2024-12-29
Version of Record valid from 2024-12-29
Chapter History
First Online: 29 December 2024