Multilayer Mirrors for Focusing Objective in 40-nm Wavelength Region
Crossref DOI link: https://doi.org/10.1007/978-3-319-73025-7_42
Published Online: 2018-02-24
Published Print: 2018
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Toyoda, M.
Tamaru, Y.
Mori, S.
Sawada, K.
Fu, Y.
Takahashi, E. J.
Suda, A.
Kannari, F.
Midorikawa, K.
Yanagihara, M.
License valid from 2018-01-01