Coherent Lithography with Tabletop Soft X-Ray Lasers: Latest Achievements and Prospects
Crossref DOI link: https://doi.org/10.1007/978-3-319-73025-7_53
Published Online: 2018-02-24
Published Print: 2018
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Marconi, M. C.
Li, W.
Kyaw, C.
Rockward, W.
Menoni, C. S.
Rocca, J. J.
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