Micrometer-Scale Photo-Direct Machining of Polydimethylsiloxane Using Laser Plasma EUV Radiations
Crossref DOI link: https://doi.org/10.1007/978-3-319-73025-7_57
Published Online: 2018-02-24
Published Print: 2018
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Urai, H.
Makimura, T.
Ogawa, M.
License valid from 2018-01-01