Soft Mold Nanoimprint: Modeling and Simulation
Crossref DOI link: https://doi.org/10.1007/978-3-319-90362-0_5
Published Online: 2018-09-23
Published Print: 2018
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhong, Yinsheng
Kwok, Stephen C. T.
Yuen, Matthew M. F.
Text and Data Mining valid from 2018-01-01