Study on the Fabrication Process of a MEMS Bistable Energy Harvester Based on Coupled Component Structures
Crossref DOI link: https://doi.org/10.1007/978-3-319-95062-4_17
Published Online: 2018-10-02
Published Print: 2019
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Derakhshani, Masoud
Allgeier, Brian E.
Berfield, Thomas A.
Text and Data Mining valid from 2018-10-02