DIC Image on FIB Ring-Core Analysis of Depth Sensing Residual Stress Measurement of Thin Films
Crossref DOI link: https://doi.org/10.1007/978-3-319-97481-1_15
Published Online: 2018-10-12
Published Print: 2019
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pan, Wen Chieh
Tsai, Ang-Ting
Cheng, Fa-Yen
Chen, Terry Yuan-Fang
Lin, Ming-Tzer
Text and Data Mining valid from 2018-10-12