Silicon Based Optical Sensor: Uncooled Infrared Focal Plane Array Based on Bi-Materials Cantilever Microstructures
Crossref DOI link: https://doi.org/10.1007/978-981-10-2798-7_37-1
Published Online: 2017-12-08
Published Print: 2018
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ye, Tianchun
Chen, Dapeng
Shi, Shali
Jiao, Binbin
License valid from 2017-12-08
Text and Data Mining valid from 2017-12-08
Chapter History
Received: 20 October 2017, 00:00:00
Accepted: 7 November 2017, 00:00:00
First Online: 8 December 2017