Computation of Actuation Voltage and Stress Made of Hafnium Oxide Materials Used in Radio Frequency Micro-electromechanical System Switch
Crossref DOI link: https://doi.org/10.1007/978-981-10-4762-6_8
Published Online: 2017-12-12
Published Print: 2018
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Saxena, Ankur
License valid from 2017-12-12
