Micro-Raman and FTIR Analysis of Silicon Carbo-Nitride Thin Films at Different H2 Flow Rate
Crossref DOI link: https://doi.org/10.1007/978-981-10-4765-7_9
Published Online: 2017-10-29
Published Print: 2018
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kumar, Dhruva
Rizal, Umesh
Das, Soham
Swain, Bhabani S.
Swain, Bibhu Prasad
License valid from 2017-10-29
Text and Data Mining valid from 2017-10-29
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First Online: 29 October 2017