Piezoelectric Micro/Nano Mechanical Devices for Frequency Control and Chemical Sensing
Crossref DOI link: https://doi.org/10.1007/978-981-10-5945-2_23
Published Online: 2018-04-20
Published Print: 2018
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pang, Wei
Zhang, Menglun
Liang, Ji
License valid from 2018-01-01
