Electrostatic Comb-Drived Actuator for MEMS Relay/Switch
Crossref DOI link: https://doi.org/10.1007/978-981-10-5945-2_30
Published Online: 2018-04-20
Published Print: 2018
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhao, Jiahao
Gao, Yongfeng
License valid from 2018-01-01
