Replication of Micro-/Nanostructures
Crossref DOI link: https://doi.org/10.1007/978-981-10-6588-0_19-1
Published Online: 2018-02-13
Published Print: 2018
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Muanchan, Paritat
Ito, Hiroshi
License valid from 2018-01-01
Text and Data Mining valid from 2018-01-01
Chapter History
Received: 30 January 2018, 00:00:00
Accepted: 31 January 2018, 00:00:00
First Online: 13 February 2018