Sintering Fabrication and Characterizations of Powder Metallurgy Targets for Integrated Circuits
Crossref DOI link: https://doi.org/10.1007/978-981-13-0104-9_106
Published Online: 2018-04-18
Published Print: 2018
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ding, Zhaochong
Liu, Xiao
Wang, Yonghui
Wang, Zhuang
Xia, Qiankun
Li, Yongjun
License valid from 2018-01-01