Thin Film Deposition by Plasma Beam of a Vacuum Arc with Refractory Anodes
Crossref DOI link: https://doi.org/10.1007/978-981-13-6133-3_1
Published Online: 2019-02-09
Published Print: 2019
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Beilis, I. I.
Boxman, R. L.
Text and Data Mining valid from 2019-01-01
Version of Record valid from 2019-01-01
Chapter History
First Online: 9 February 2019