Design and Simulation of 3D MEMS Actuating System for Optical Scanning Application
Crossref DOI link: https://doi.org/10.1007/978-981-15-1059-5_35
Published Online: 2020-02-29
Published Print: 2020
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Rathore, Shivani
Bhatia, Deepak
Text and Data Mining valid from 2020-01-01
Version of Record valid from 2020-01-01
Chapter History
First Online: 29 February 2020