PDMS on ZnO Thin Film: A Mask for ZnO Thin FilmĀ in MEMS Fabrication
Crossref DOI link: https://doi.org/10.1007/978-981-15-9904-0_9
Published Online: 2021-02-22
Published Print: 2021
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Joshi, Priyanka
Akhtar, Jamil
Text and Data Mining valid from 2021-01-01
Version of Record valid from 2021-01-01
Chapter History
First Online: 22 February 2021