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Design and Simulation of MEMS Based Capacitive Accelerometer

Crossref DOI link: https://doi.org/10.1007/978-981-16-2919-8_19

Published Online: 2021-09-12

Published Print: 2022

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Veena, S.

Rai, Newton

Morey, Amogh Manjunath Rao

Suresh, H. L.

Shaik, Habibuddin
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Text and Data Mining valid from 2021-09-12

Version of Record valid from 2021-09-12
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Chapter History

First Online: 12 September 2021