Double Zone Thermal CVD and Plasma Enhanced CVD Systems for Deposition of Films/Coatings with Eminent Conformal Coverage
Crossref DOI link: https://doi.org/10.1007/978-981-16-9523-0_31
Published Online: 2022-11-11
Published Print: 2023
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shreya,
Yadav, Anukool
Khatri, Ritika
Jain, Nikita
Bhandari, Anurag
Puri, Nitin K.
Text and Data Mining valid from 2022-11-11
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Chapter History
First Online: 11 November 2022