Performance Analysis and Simulation of MEMS Capacitive Pressure Sensor
Crossref DOI link: https://doi.org/10.1007/978-981-19-0588-9_14
Published Online: 2022-10-05
Published Print: 2023
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ananthi, S.
Lamba, Monica
Chaudhary, Himanshu
Singh, Kulwant
Text and Data Mining valid from 2022-10-05
Version of Record valid from 2022-10-05
Chapter History
First Online: 5 October 2022