Design and Simulation of Parallel Plate-Comb Type Mems Capacitive Accelerometer Using COMSOL
Crossref DOI link: https://doi.org/10.1007/978-981-19-2308-1_40
Published Online: 2022-09-12
Published Print: 2023
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Likhith, C. S. http://orcid.org/0000-0003-0000-7053
Asha, K. http://orcid.org/0000-0002-7517-4588
Krishnaswamy, Narayan http://orcid.org/0000-0003-2418-8418
Text and Data Mining valid from 2022-09-12
Version of Record valid from 2022-09-12
Chapter History
First Online: 12 September 2022