Design and Simulation of MEMS-Based Two-Directional Capacitive Pressure Sensor
Crossref DOI link: https://doi.org/10.1007/978-981-19-4304-1_19
Published Online: 2022-10-02
Published Print: 2023
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sasank, Yellapragada V. S.
Sathya Swaroop, Chennam J. V. K.
Sriram, Ghanta
Sahoo, Satyajeet
Taj, M.
Text and Data Mining valid from 2022-10-02
Version of Record valid from 2022-10-02
Chapter History
First Online: 2 October 2022