Driving force profile design in comb drive electrostatic actuators using a level set-based shape optimization method
Crossref DOI link: https://doi.org/10.1007/s00158-014-1130-y
Published Online: 2014-07-20
Published Print: 2015-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kotani, Takayo
Yamada, Takayuki
Yamasaki, Shintaro
Ohkado, Makoto
Izui, Kazuhiro
Nishiwaki, Shinji
Text and Data Mining valid from 2014-07-20