Design of diaphragm structure for piezoresistive pressure sensor using topology optimization
Crossref DOI link: https://doi.org/10.1007/s00158-016-1470-x
Published Online: 2016-06-03
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhu, Benliang
Zhang, Xianmin
Zhang, Yanzhen
Fatikow, Sergej
License valid from 2016-06-03