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A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad

Crossref DOI link: https://doi.org/10.1007/s00170-014-6438-7

Published Online: 2014-10-10

Published Print: 2015-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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