Ultraprecision machining of diffraction optical elements on soft semiconductor crystal
Crossref DOI link: https://doi.org/10.1007/s00170-014-6449-4
Published Online: 2014-11-06
Published Print: 2015-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jasinevicius, Renato G.
Pizani, Paulo S.
Cirino, Giuseppe A.
Text and Data Mining valid from 2014-11-06