Surface and subsurface characterisation in micro-milling of monocrystalline silicon
Crossref DOI link: https://doi.org/10.1007/s00170-015-7308-7
Published Online: 2015-05-21
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Huo, Dehong
Lin, Chao
Choong, Zi Jie
Pancholi, Ketan
Degenaar, Patrick
Text and Data Mining valid from 2015-05-21
Version of Record valid from 2015-05-21
Article History
Received: 23 March 2015
Accepted: 11 May 2015
First Online: 21 May 2015