Roll error measurement system for linear moving stages using four capacitance sensors
Crossref DOI link: https://doi.org/10.1007/s00170-015-7872-x
Published Online: 2015-10-03
Published Print: 2016-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Park, Sung-Ryung
Jang, Jin-Seok
Yang, Seung-Han
Text and Data Mining valid from 2015-10-03
