Electrochemical mechanical polishing technology: recent developments and future research and industrial needs
Crossref DOI link: https://doi.org/10.1007/s00170-015-8119-6
Published Online: 2016-01-12
Published Print: 2016-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mohammad, Abd El Khalick
Wang, Danwei
Funding for this research was provided by:
Agency for Science, Technology and Research (A*STAR), Singapore (Grant No. 122510004 (M4070209.040))
Text and Data Mining valid from 2016-01-12