Effect of chemical additive on fixed abrasive pad self-conditioning in CMP
Crossref DOI link: https://doi.org/10.1007/s00170-016-8771-5
Published Online: 2016-04-20
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Jun
Huang, Jiandong
Xia, Lei
Zhu, Yongwei
Zuo, Dunwen
Funding for this research was provided by:
Fundamental Research Funds for the Central Universities (NS2016047)
Text and Data Mining valid from 2016-04-20