Crossmark

Experimental study of surface performance of monocrystalline 6H-SiC substrates in plane grinding with a metal-bonded diamond wheel

Crossref DOI link: https://doi.org/10.1007/s00170-016-9095-1

Published Online: 2016-07-06

Published Print: 2017-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Pan, Jisheng

Zhang, Xiaowei

Yan, Qiusheng

Chen, Shenkai
Funding

Funding for this research was provided by:

the National Natural Science Foundation of China (51305082)

the National Natural Science Foundation of China (U1034006)

Guangdong Provincial Science and Technology project (2016A010102014)
License Information

License valid from 2016-07-06