Material removal model of ultrasonic elliptical vibration-assisted chemical mechanical polishing for hard and brittle materials
Crossref DOI link: https://doi.org/10.1007/s00170-017-0081-z
Published Online: 2017-02-17
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Liu, Defu
Yan, Riming
Chen, Tao
Funding for this research was provided by:
National Natural Science Foundation of China (51275534)
Natural Science Foundation of Hunan province of China (2015JJ2153)
License valid from 2017-02-17