Laser-assisted grinding of silicon nitride by picosecond laser
Crossref DOI link: https://doi.org/10.1007/s00170-017-0440-9
Published Online: 2017-07-04
Published Print: 2017-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Azarhoushang, Bahman http://orcid.org/0000-0003-4393-4500
Soltani, Babak
Zahedi, Ali
Funding for this research was provided by:
Ministerium für Wissenschaft, Forschung und Kunst Baden-Württemberg
License valid from 2017-07-04