Development of a modified through-mask electrochemical micromachining for micropatterning nonplanar surface
Crossref DOI link: https://doi.org/10.1007/s00170-017-0541-5
Published Online: 2017-07-06
Published Print: 2017-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ming, Pingmei
Zhou, Weihai
Zhao, Chenhao
Zhou, Hongmei
Ge, Qin
Zhang, Xinmin
Funding for this research was provided by:
National Natural Science Foundation of China (51475149)
License valid from 2017-07-06