Crossmark

Effect of motion accuracy on material removal during the CMP process for large-aperture plane optics

Crossref DOI link: https://doi.org/10.1007/s00170-017-0857-1

Published Online: 2017-08-07

Published Print: 2018-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Zhang, C. P.

Zhao, H. Y.

Xie, R. Q.

Zhao, Z. X.

Gu, Y. W.

Jiang, Z. D.
Funding

Funding for this research was provided by:

Science Challenge Project (No: JCKY2016212A506-0501)

Important National Science & Technology Specific Projects (No: 2013ZX04006011-201)
License Information

License valid from 2017-08-07