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Surface figure control in fine rotation grinding process of thick silicon mirror

Crossref DOI link: https://doi.org/10.1007/s00170-018-2328-8

Published Online: 2018-06-15

Published Print: 2018-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Jiang, Bocheng

Zhao, Dewen

Liu, Yuhong

Lu, Xinchun
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (91323302)

National Basic Research Program of China (2015CB057203)
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Article History

Received: 12 January 2018

Accepted: 5 June 2018

First Online: 15 June 2018