Guo, Haixin
Wang, Xibin
Liang, Zhiqiang
Zhou, Tianfeng
Jiao, Li
Liu, Zhibing
Teng, Longlong
Shen, Wenhua
Funding for this research was provided by:
National Natural Science Foundation of China (No.51575049)
National Basic Research Program of China (No.2015CB059900)
Key Laboratory of Micro-systems and Micro-structures Manufacturing of Ministry of Education, Harbin Institute of Technology (No.2015KM005)
Article History
Received: 10 April 2018
Accepted: 20 July 2018
First Online: 21 August 2018