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A stack fusion model for material removal rate prediction in chemical-mechanical planarization process

Crossref DOI link: https://doi.org/10.1007/s00170-018-2578-5

Published Online: 2018-09-03

Published Print: 2018-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Zhao, Shuai

Huang, Yixiang
Funding

Funding for this research was provided by:

National Key Technology Research and Development Program (2015BAF11B01)

National Natural Science Foundation of China (51305258)
License Information

Text and Data Mining valid from 2018-09-03
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Article History

Received: 24 March 2018

Accepted: 14 August 2018

First Online: 3 September 2018