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High-aspect ratio mechanical microdrilling process for a microhole array of nitride ceramics

Published Online: 2018-10-22

Published Print: 2019-02

Authors

Chang, Dar-Yuan

Lin, Chien-Hung
Funding

Funding for this research was provided by:

Ministry of Science and Technology, Taiwan (MOST 105-2221-E-034-005)
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Text and Data Mining valid from 2018-10-22
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Article History

Received: 23 June 2018

Accepted: 9 October 2018

First Online: 22 October 2018

Document is current