Large-scale data analysis of PECVD amorphous silicon interface passivation layer via the optical emission spectra for parameterized PCA
Crossref DOI link: https://doi.org/10.1007/s00170-018-2938-1
Published Online: 2018-10-31
Published Print: 2019-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Huang, Hung-Jui
Kau, Li-Han
Wang, Ho-Song
Hsieh, Yu-Lin
Lee, Chien-Chieh
Fuh, Yiin-Kuen
Li, Tomi T.
Text and Data Mining valid from 2018-10-31
Article History
Received: 21 August 2018
Accepted: 24 October 2018
First Online: 31 October 2018