A first review of optical edge-diffraction technology for precision dimensional metrology
Crossref DOI link: https://doi.org/10.1007/s00170-019-03319-8
Published Online: 2019-02-01
Published Print: 2019-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, ChaBum http://orcid.org/0000-0002-0053-6863
Funding for this research was provided by:
Directorate for Engineering (1463502)
Text and Data Mining valid from 2019-02-01
Version of Record valid from 2019-02-01
Article History
Received: 30 October 2018
Accepted: 14 January 2019
First Online: 1 February 2019