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Effects of AFM tip wear on evaluating the surface quality machined by ultra-precision machining process

Published Online: 2019-06-11

Published Print: 2019-12

Authors

Xue, Bo

Geng, Yanquan

Yan, Yongda

Sun, Yazhou
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (51705104, 51675134)
License Information

Text and Data Mining valid from 2019-06-11

Version of Record valid from 2019-06-11
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Article History

Received: 18 April 2018

Accepted: 29 May 2019

First Online: 11 June 2019

Document is current