Document is current

Any future updates will be listed below

Aerostatic moving stage positioning compensation using a numerical algorithm combined with an image acquisition method

Crossref DOI link: https://doi.org/10.1007/s00170-019-04077-3

Published Online: 2019-07-02

Published Print: 2019-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

About CrossMark