Polishing single-crystal silicon carbide with porous structure diamond and graphene-TiO2 slurries
Crossref DOI link: https://doi.org/10.1007/s00170-019-04223-x
Published Online: 2019-09-12
Published Print: 2019-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tsai, Ming Yi
Hoo, Zuan Tang
Text and Data Mining valid from 2019-09-12
Version of Record valid from 2019-09-12
Article History
Received: 12 May 2019
Accepted: 31 July 2019
First Online: 12 September 2019